Through-mask electrochemical micromachining of thin metallic
- Author(s):
- Publication title:
- Proceedings of the Second International Symposium on Electrochemical Technology Applications in Electronics
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1993-20
- Pub. Year:
- 1993
- Page(from):
- 123
- Page(to):
- 132
- Pages:
- 10
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770620 [1566770629]
- Language:
- English
- Call no.:
- E23400/932472
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Investigation of Island Formation Problem During Through-Mask Electrochemical Micromachining
Electrochemical Society |
7
Conference Proceedings
Electrochemical Micromachining: An Alternate Microfabrication Technology for MEMS
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
3
Conference Proceedings
Microfabrication by through-mask electrochemical micromachining (Invited Paper)
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
4
Conference Proceedings
17 Effect of mask wall angle on shape evolution during through-mask electrochemical micromachining
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |