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GAS PHASE INVESTIGATIONS DURING DIAMOND DEPOSITION WITH HFCVD AND MW-PECVD

Author(s):
Publication title:
Proceedings of the Third International Symposium on Diamond Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-17
Pub. Year:
1993
Page(from):
1026
Page(to):
1031
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770606 [1566770602]
Language:
English
Call no.:
E23400/932032
Type:
Conference Proceedings

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