Blank Cover Image

STUDY OF THE STACKING FAULT NUCLEI GENERATION/ DISSOLUTION TEMPERATURES ON CZ SILICON WAFERS AND ITS DEPENDENCE ON THE CRYSTAL POSITION

Author(s):
Publication title:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-15
Pub. Year:
1993
Page(from):
16
Page(to):
25
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770590 [1566770599]
Language:
English
Call no.:
E23400/932030
Type:
Conference Proceedings

Similar Items:

Borionetti, G., Porrini, M., Geranzani, P., Orizio, R., Falster, R.

Electrochemical Society

Borioneui, G., Gambaro, D., Porrini, M., Voronkov, V.V.

Electrochemical Society

Borionetti, G., Godio, P., Porrini, M., Ilic, S.

Electrochemical Society

G. Borionetti, A. Corradi, N. Mainardi, A.M. Rinaldi, K. Takami

Electrochemical Society

Sueoka,K., Akatsuka,M., Nishihara,K., Yamamoto,T., Kobayashi,S.

Trans Tech Publications

Vanhellemont, J., De Gryse, O., Clauws, P.

Electrochemical Society

Tanahashi, K., Inoue, N., Mizokawa, Y.

MRS - Materials Research Society

Porrini, M., Gambaro, D., Geranzani, P., Falster, R.

Electrochemical Society

Shaffner, T.J.

Electrochemical Society

Corradi, A., Borzoni, E., Godio, P., Borionetti, G.

MRS - Materials Research Society

Borioneui, G., Gambaro, D., Porrini, M., Voronkov, V.V.

Electrochemical Society

S. M. Shandarov, L. E. Polyakova, A. E. Mandel, M. G. Kisteneva, J. Vidal, Y. F. Kargin, A. V. Egorysheva

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12