Reliable Thin-Gate Oxide Films Formed After UV Cleaning

Reliable Thin-Gate Oxide Films Formed After UV Cleaning

Author(s):

Publication title:

Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-13

Pub. Year:

1993

Page(from):

163

Page(to):

171

Pages:

9

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770637 [1566770637]

Language:

English

Call no.:

E23400/932028

Type:

Conference Proceedings

Details

TDL ID:	ZA00014102
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology
Conf. info. (Number):	4th
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	1993.05.17-1993.05.18

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