Blank Cover Image

MOLECULAR DYNAMICS OF VOID MOVEMENT DUETO ELECTROMIGATION

Author(s):
Publication title:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-6
Pub. Year:
1993
Page(from):
263
Page(to):
270
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770644 [1566770645]
Language:
English
Call no.:
E23400/930578
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings TEM OBSERVATION OF THE DAMAGES IN HEAVILY ION-IMPLANTED FINE Si COLUMNS

Shingubara, S., Sukesako, H., Kawasaki, T., Inoue, K., Matusi, Y., Sakaue, H., Takahagi, T., Horiike, Y.

MRS - Materials Research Society
7 Conference Proceedings Aluminum nanodot array formed by anodic oxidation and its conduction properties (Invited Paper)

Shingubara, S., Murakami, Y., Sakaue, H., Takahagi, T.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Cu Deposition Characteristics into Submicron Contact Holes Employing Self-Sputtering with a High Ionization Rate

Shingubara, S., Sano, A., Sakaue, H., Takahagi, T., Horiike, Y., Radzimski, Z. J., Posadowski, W. M.

MRS - Materials Research Society
8 Conference Proceedings A Possible Mechanism for Hexagonal Void Movement Observed during Sublimation Growth of SiC Single Crystals

T. Fujimoto, H. Tsuge, M. Katsuno, S. Sato, H. Yashiro

Trans Tech Publications
3 Conference Proceedings Void Elongation Phenomena Observed in Polycrystalline Cu Interconnects at High Current Density Stressing Conditions

Shingubara, S., Kajiwara, S., Osaka, T., Sakaue, H., Takahagi, T.

MRS - Materials Research Society
9 Conference Proceedings Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition

H. Mori, T. Korenaga, N. Hosomi, T. Terui, S. Shingubara

Electrochemical Society
4 Conference Proceedings Sputtering of TiN/Ti Films into Submicron contact Holes Employing ECR Sputtering with High Magnetic Field

S. Shingubara, N. Morimoto, I. Utsunomiya, H. Shindo, Y. Horiike

Electrochemical Society
10 Conference Proceedings Evaluation of GexSbyTez Film Grown by Chemical Vapor Deposition

S. Hamada, T. Horiike, T. Uno, M. Ishikawa, H. Machida

Trans Tech Publications
5 Conference Proceedings Issues and Future Trends For Advanced Dry Etching

Horiike, Y.

Electrochemical Society
11 Conference Proceedings Electromigration Reliability Study of a GMR Spin Valve Device

Shingubara, S., Takeda, Y., Sakue, H., Takahagi, T., Verbruggen, A. H.

MRS - Materials Research Society
6 Conference Proceedings In Situ Observation of Thermal Stress in Nano-Size Thin Aluminum Films

Hanabusa, T., Kusaka, K., Shingubara, S., Sakata, O.

Trans Tech Publications
12 Conference Proceedings Formation of Al Nanodot Array by the Combination of Nano-Indentation and Anodic Oxidation

Shingubara, S., Murakami, Y., Morimoto, K., Sakaue, H., Takahagi, T.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12