Characterization of the Silane Surface Reaction in the Chemical Vapor Deposition of Polysilicon in a Cold Wall, Rapid Thermal System
- Author(s):
- Publication title:
- Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1993-2
- Pub. Year:
- 1993
- Page(from):
- 34
- Page(to):
- 40
- Pages:
- 7
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770743 [1566770742]
- Language:
- English
- Call no.:
- E23400/930161
- Type:
- Conference Proceedings
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