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Solid Phase Epitaxy- Activation and Deactivation of Boron in Ultra-Shallow Junctions

Author(s):
Lerch, W.
Paul, S.
Niess, J.
Crisliano, F.
Lamrani, Y.
Colvo, P.
Cherkashin, N.
Downey, D.F.
Arevalo, E.A.
4 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-01
Pub. Year:
2004
Page(from):
90
Page(to):
105
Pages:
16
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774062 [1566774063]
Language:
English
Call no.:
E23400/200401
Type:
Conference Proceedings

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