CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): CA DEGRADATION MONITORING BY UV/VIS SPECTROSCOPY

CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): CA DEGRADATION MONITORING BY UV/VIS SPECTROSCOPY

Author(s):

Publication title:

Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-26

Pub. Year:

2003

Page(from):

362

Page(to):

370

Pages:

9

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774116 [156677411X]

Language:

English

Call no.:

E23400/200326

Type:

Conference Proceedings

Details

TDL ID:	ZA00014088
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Meeting of the Electrochemical Society
Conf. info. (Number):	8th ; 2003
Conf. info. (Venue):	Orlando, Florida, USA
Conf. info. (Date):	2003.10.00

Similar Items:

1 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy Doll, O., Kolbesen, B.O. SPIE-The International Society for Optical Engineering	7 Conference Proceedings ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL Onsia, B., Schellkes, E., Vos, R., De Gendt, S., Doll, O., Fester, A., Kolbesen, B., Hoffman, M., Hatcher, Z., Wolke, … Electrochemical Society
2 Conference Proceedings Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UVIVIS-Spectroscopy Doll, O., Kolbesen, B.O. Electrochemical Society	8 Conference Proceedings Process Monitoring Using UV-VIS Spectroscopy Bart, J. C. J. Society of Plastics Engineers, Inc. (SPE)
3 Conference Proceedings Cleaning Chemistry with Complexing Agents (CAs): Direct Concentration Measurement of CAs with HPLC Metzger, S., Kolbesen, B.O. SPIE-The International Society for Optical Engineering	9 Conference Proceedings DEVELOPMENT OF HIGH-TEMPERATURE UV-VIS-NIR SPECTROSCOPY FOR THE MEASUREMENT OF FRHE ENERGIES OF COMPLEXATION AT ELEVATED TEMPERATURES Robouch, Piotr, Grat, Pat, Torrez, Richard A., Baisden, P.A., Silva, Robert J. Materials Research Society
4 Conference Proceedings Cleaning Chemistry with Complexing Agents (CAs): Direct Concentration Measurement of CAs with HPLC Metzger, S., Kolbesen, B.O. Electrochemical Society	10 Conference Proceedings (204e) Monitoring Fission Products and Actinide Levels during Pyroprocessing Via UV-Vis Absorption Spectroscopy Abraham Jurovitzki, Michael Simpson American Institute of Chemical Engineers
5 Conference Proceedings CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): DECOMPOSITION OF CAs IN HYDROGEN PEROXIDE AND APM STUDIED WITH HPLC Metzger, S., Kolbesen, B.O. Electrochemical Society	11 Conference Proceedings Study by optical multichannel analysis, UV-vis-near-IR spectroscopy, and Raman spectroscopy of the degradation mechanisms in a polyaniline/SnO₂ … M.-C. Bernard, A. Hugot-Le Goff, W. Zeng Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings DEGRADATION OF CHELATING AGENTS IN HYDROGEN PEROXIDE AND APM+ SOLUTIONS O. Doll, S. Metzger, B. O. Kolbesen Electrochemical Society	12 Conference Proceedings Blood characterization using UV/vis spectroscopy Y.D. Mattley, F. Mitrani-Gold, S. Orton, C.P. Bacon, G. Leparc Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12