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MECHANISMS OF PARTICLE REMOVAL DURING BRUSH SCRUBBER CLEANING

Author(s):
Xu, K.
Vos, R.
Vereecke, G.
Mertens, P.
Heyns, M.
Vinckier, C.
Fransaer, J.
2 more
Publication title:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-26
Pub. Year:
2003
Page(from):
137
Page(to):
144
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774116 [156677411X]
Language:
English
Call no.:
E23400/200326
Type:
Conference Proceedings

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