36NM-Si Pillar Fabricated by Three-Dimensional (3D) Thermal Oxidation of Silicon

36NM-Si Pillar Fabricated by Three-Dimensional (3D) Thermal Oxidation of Silicon

Author(s):

Publication title:

Surface oxide films : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-25

Pub. Year:

2003

Page(from):

341

Page(to):

345

Pages:

5

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566774109 [1566774101]

Language:

English

Call no.:

E23400/200325

Type:

Conference Proceedings

Details

TDL ID:	ZA00014087
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Surface Oxide Films ; Electrochemical Society Meeting
Conf. info. (Number):	2003 ; 204th
Conf. info. (Venue):	Orlando, FL, USA
Conf. info. (Date):	2003.10.12-2003.10.17

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