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54. Modelling of HfO, film deposition from Hf(mmp)4

Author(s):
Yano, T.
Kagotswne, A.
Fujitnoro, T.
Hoshino, M.
Watanabe, T.
Asai, M.
Horii, S.
Miya, H.
Kamiyo, M.
Hirao, K.
5 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-14
Pub. Year:
2003
Page(from):
437
Page(to):
442
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
Language:
English
Call no.:
E23400/200314
Type:
Conference Proceedings

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