43. Roadblocks and detours for poly-silicon / metal-oxide MOS integration
- Author(s):
Gilmer, D.C. Hobbs, C. Grant, J. Hegde, R. Tseng, H. Triyoso, D. Roan, D. Cotton, R. Smith, J Dhandapani, V Garcia, R. Dip, L. Rai, R. Conner, J Samavedam, S. Taylor, B. Tobin, P.J. - Publication title:
- Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2003-14
- Pub. Year:
- 2003
- Page(from):
- 345
- Page(to):
- 360
- Pages:
- 16
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773966 [1566773962]
- Language:
- English
- Call no.:
- E23400/200314
- Type:
- Conference Proceedings
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