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3 Time-resolved analysis of flash-assist RTP thermal pulse progression in SOI and bulk silicon wafers

Author(s):
Elliott, K.
McCoy, S.
Comm, D.M.
Gelpev, J.C.
Tichy, R.
Larson, L.
1 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-14
Pub. Year:
2003
Page(from):
17
Page(to):
24
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
Language:
English
Call no.:
E23400/200314
Type:
Conference Proceedings

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