Ultra-thin Tungsten CVD Nucleation Layer for Sub-100 nm Contact Applications
- Author(s):
- Publication title:
- Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2003-10
- Pub. Year:
- 2003
- Page(from):
- 16
- Page(to):
- 20
- Pages:
- 5
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772945 [156677294X]
- Language:
- English
- Call no.:
- E23400/200310
- Type:
- Conference Proceedings
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