Synthesis of Carbon Nanotubes by Plasma-Enhanced Chemical Vapor Deposition

Synthesis of Carbon Nanotubes by Plasma-Enhanced Chemical Vapor Deposition

Author(s):

Publication title:

Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-9

Pub. Year:

2003

Page(from):

311

Page(to):

315

Pages:

5

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773898 [156677389X]

Language:

English

Call no.:

E23400/200309

Type:

Conference Proceedings

Details

TDL ID:	ZA00014073
Series ID:	PA00000028
Conf. info. (Name):	SBMICRO
Conf. info. (Number):	18th (2003)
Conf. info. (Venue):	Sao Paulo, Brazil
Conf. info. (Date):	2003.09.08-2003.09.11

Similar Items:

1 Conference Proceedings Study of Power Balance in Asymmetric Capacitively Coupled Discharge Plasmas used for Material Processing Moshkalyov, S.A., Reyes-Betanzo, C., Swart, J.W. Electrochemical Society	7 Conference Proceedings Growth of Carbon Nanostructures by Thermal Chemical Vapor Deposition via Metal Catalysis Verissimo, C., Moshkalyov, S. A., Ramos, A. C. S., Goncalves, J. L., Swart, J. W. Electrochemical Society
2 Conference Proceedings Selective Silicon Nitride Etching by ECR Plasmas Using SF6 and NF3 Based Gas Mixtures Reyes-Betanzo, C., Moshkalyov, S.A., Swart, J.W., Ramos, A.C.S. Electrochemical Society	8 Conference Proceedings Reactive Ion Etching of SiGe Using Halogen-Based Plasmas Reyes-Betanzo, C., Moshkalyov, S. A. Electrochemical Society
3 Conference Proceedings Effect of Oxygen and Nitrogen Additions on Silicon Nitride Reactive Ion Etching in Fluorine Containing Plasmas Reyes-Betanzo, C., Moshkalyov, S.A., Ramos, A.C.S., Cotta, M.A., Swart, J.W. Electrochemical Society	9 Conference Proceedings Use of a Langmuir Probe for ECR Plasma Characterization Daltrini, A. M., Moshkalyov, S. A., Ramos, A. C. S., Swart, J. W. Electrochemical Society
4 Conference Proceedings Deep Anisotropic Etching of Silicon with Smooth Surface for Micromachining Applications Moshkalyov, S.A., Reyes-Betanzo, C., Swart, J.W. Electrochemical Society	10 Conference Proceedings Fabrication of Multi-point Test Structures Using Focused Ion Beam and Selective Carbon Nanotubes Deposition by Dielectrophoresis M.M. Silva, A. Vaz, C. Veríssimo, S.A. Moshkalev, J.W. Swart Electrochemical Society
5 Conference Proceedings Study of Carbon Nanotubes Growth by Atmospheric Pressure Chemical Vapor Deposition Verissimo, C., Moshkalyov, S. A., Ramos, A. C. S., Goncalves, J. L., Leon, J., Swart, J. W. Electrochemical Society	11 Conference Proceedings Suspended Membranes Made by Silicon Nitride Deposited by ECR-CVD Biasotto, C., Monte, B., Neli, R. R., Ramos, A. C. S., Diniz, J. A., Moshkalyov, S.A., Doi, I., Swart, J. W. Electrochemical Society
6 Conference Proceedings Fabrication of Submicron Structures in Polycristalline Silicon by Reactive Ion Etching Using Fluorine- and Chlorine- Containing Plasmas Reyes-Betanzo, C., Moshkalyov, S.A., Seabra, A.C., Swart, J.W. Electrochemical Society	12 Conference Proceedings Plasma Enhanced Chemical Vapor Deposited Carbon Nanotubes for Field Emission Applications Teo, K.B.K., Pirio, G., Lee, S.B., Chhowalla, M., Legagneux, P., Nedellec, Y., Hasko, D.G., Ahmed, H., Pribat, D., … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12