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HfO2 Films Obtained By Injection MOCVD

Author(s):
Leedham, T.J.
Davies, H.O.
Jones, A.C.
O'Sullivan, B.J.
Mondreau, M.
Hurley, P.K.
Fang, Q.
Boyd, I.W.
3 more
Publication title:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
Pub. Year:
2003
Page(from):
907
Page(to):
914
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
Language:
English
Call no.:
E23400/200308
Type:
Conference Proceedings

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