Simulation of Epitaxial Silicon Deposition and Dopant Incorporation in an Industrial Barrel Reactor

Simulation of Epitaxial Silicon Deposition and Dopant Incorporation in an Industrial Barrel Reactor

Author(s):

Di Stanislao, M.

Publication title:

Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-8

Pub. Year:

2003

Page(from):

226

Page(to):

234

Pages:

9

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773782 [1566773784]

Language:

English

Call no.:

E23400/200308

Type:

Conference Proceedings

Details

TDL ID:	ZA00014071
Series ID:	PA00000028
Conf. info. (Name):	International Conference on Chemical Vapor Deposition ; EUROCVD ; Electrochemical Society Meeting
Conf. info. (Number):	16th ; 14th ; 203rd
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	2003.04.27-2003.05.02

Similar Items:

1 Conference Proceedings Modeling and Optimization of Barrel Reactors for Epitaxial Silicon CVD Masi, M., Fogliani, S., Carra, S. Electrochemical Society	7 Conference Proceedings Film Morphology and Process Conditions in Epitaxial Silicon Carbide Growth via Chlorides Route M. Masi, A. Veneroni, A. Fiorucci, F.L. Via, G. Foti, M. Mauceri, S. Leone, G. Pistone, G. Condorelli, G. Abbondanza, … Trans Tech Publications
2 Conference Proceedings Kinetic Mechanism of Silicon Epitaxial Growth from Chlorosilanes Valente, G., Cavallotti, C., Masi, M., Carra, S. Electrochemical Society	8 Conference Proceedings Modeling of Growth Processes in Epitaxial Reactors Carra,S., Cavallotti,C., Masi,M. Trans Tech Publications
3 Conference Proceedings Towards the Optimization of AMT Barrel Reactors for Silicon Epitaxy Masi, M., Radaelli, G., Roda, N., Raimondi, P., Carra, S., Vaccari, G., Crippa, D. MRS - Materials Research Society	9 Conference Proceedings Multi-Scale and Multi-Hierarchy Modeling in Electronic Materials Processing (Keynote) Maurizio Masi, Carlo Cavallotti, Gianluca Valente, Marco di Stanislao American Society of Mechanical Engineers
4 Conference Proceedings Detailed Modeling of Barrel Chemical Vapor Deposition Reactors Masi,M., Fogliani,S., Carra,S. Trans Tech Publications	10 Conference Proceedings New Achievements on CVD Based Methods for SiC Epitaxial Growth Crippa, D., Valente, G. L., Ruggiero, A., Neri, L., Reitano, R., Calcagno, L., Foti, G., Mauceri, M., Leone, S., … Trans Tech Publications
5 Conference Proceedings Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor Veneroni, A., Omarini, F., Masi, M., Leone, S., Mauceri, M., Pistone, G., Abbondanza, G. Trans Tech Publications	11 Conference Proceedings Reduced Gas Phase and Surface Kinetics for Silicon Carbide Epitaxial Growth M. Masi, A. Veneroni Electrochemical Society
6 Conference Proceedings Simulation of Diamond-Like Carbon Deposition in PECVD Reactors Masi, M., Cavallotti, C., Carra, S. Electrochemical Society	12 Conference Proceedings Trends in Dopant Incorporation for 3C-SiC Films on Silicon M. Zielinski, M. Portail, H. Peyre, T. Chassagne, S. Ndiaye, B. Boyer, A. Leycuras, J. Camassel Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12