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Extremely Scaled Ultra-Thin Body and FinFET CMOS Devices*

Author(s):
Balasubramanion, S.
Chang, L.
Choi, Y.-K.
Ha, D.
Lee, J.
Ranade, P.
Xiong, S.
Bokor, J.
Hu, C.
King, T.-J.
5 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
Pub. Year:
2003
Page(from):
534
Page(to):
545
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
Language:
English
Call no.:
E23400/200306
Type:
Conference Proceedings

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