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Defect Generation and Suppression in Device Processes Using a Shallow Trench Isolation Scheme

Author(s):
Peschiarolli, D.
Brambilla, M.
Carnevale, G.P.
Cascella, A.
Cazzaniga, F
Clementi, c.
Cremonesi, C.
Gilardini, A.
Martinelli, M.
Maurelli, A
Mica, I.
Pavan, A.
Pavia, G.
Piazza, F.
Polignano, M.L.
Soncini, V.
Bonera, E.
12 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
Pub. Year:
2003
Page(from):
477
Page(to):
488
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
Language:
English
Call no.:
E23400/200306
Type:
Conference Proceedings

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