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A Novel Approach to Contact Integration at 90-nm and Beyond

Author(s):
Singhal, A.
Sparks, T.
Strozewski, K.
Huang, F.
Parihar, S.
Schmidt, J.
Boeck, B.
Fretwell, J.
Veap, G.
Sheth, V.
Veeraghavan, S.
Melnick, B.
7 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
Pub. Year:
2003
Page(from):
217
Page(to):
222
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
Language:
English
Call no.:
E23400/200306
Type:
Conference Proceedings

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