Characterization of SOI wafers by photoluminescence spectroscopy, decay and micro/macro-mapping

Characterization of SOI wafers by photoluminescence spectroscopy, decay and micro/macro-mapping

Author(s):: Tajima, M.
Publication title:: Silicon-on-insulator technology and devices XI : proceedings of the international symposium
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 2003-5
Pub. Year:: 2003
Page(from):: 413
Page(to):: 424
Pages:: 12
Pub. info.:: Pennington, N.J.: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566773751 [156677375X]
Language:: English
Call no.:: E23400/200305
Type:: Conference Proceedings

Details

TDL ID:	ZA00014068
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Silicon-on-Insulator Technology and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	11th ; 203rd
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	2003.04.28-2003.05.02

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