Characterization of Trace Organic Contamination on Silicon Surfaces in Semiconductor Manufacturing

Characterization of Trace Organic Contamination on Silicon Surfaces in Semiconductor Manufacturing

Author(s):

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-3

Pub. Year:

2003

Page(from):

136

Page(to):

149

Pages:

14

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773485 [1566773482]

Language:

English

Call no.:

E23400/200303

Type:

Conference Proceedings

Details

TDL ID:	ZA00014066
Series ID:	PA00000028
Conf. info. (Name):	ALTECH ; Meeting of the Electrochemical Society ; Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	4th (2003) ; 203rd ; 2002 ; 202nd
Conf. info. (Venue):	Paris, France ; Paris, France ; Salt Lake City, UT, USA ; Salt Lake City, UT, USA
Conf. info. (Date):	2003.04.27-2003.05.02 ; 2003.04.27-2003.05.02 ; 2002.10.21-2002.10.25 ; 2002.10.21-2002.10.25

Similar Items:

1 Conference Proceedings Characterization of Trace Organic Contamination on Silicon Surfaces in Semiconductor Manufacturing Saga, K., Hattori, T. SPIE-The International Society for Optical Engineering	7 Conference Proceedings INVITED: ORGANIC CONTAMINATION ANALYSIS IN SEMICONDUCTOR SILICON TECHNOLOGY DETRIMENTAL 'CLEANLINESS' IN CLEANROOMS Budde, K., Holzapfel, W. Electrochemical Society
2 Conference Proceedings Influence of Surface Organic Contamination on the Incubation Time in Low-Pressure Chemical Vapor Deposition of Silicon Nitride on Silicon Substrates Saga, Koichiro, Hattori, Takeshi MRS - Materials Research Society	8 Conference Proceedings The Effect of Surface Contamination on Avalanche Breakdown in Recessed Al-Gate GaAs MESFETs Hattori, R., Kuragaki, T., Sato, K., Takano, H., Otsubo, M., Mitsui, S. Electrochemical Society
3 Conference Proceedings Acceleration of Organic Contaminant Adsorption Onto Silicon Surfaces in the Presence of Residual Fluorine Saga, Koichiro, Hattori, Takeshi MRS - Materials Research Society	9 Conference Proceedings INITIAL STAGE OF SiO2/Si INTERFACE FORMATION ON HYDROGEN-TERMINATED SILICON SURFACES Hattori, T., Nohira, H., Ohishi, K., Shimizu, Y., Tamura, Y. MRS - Materials Research Society
4 Conference Proceedings INFLUENCE OF AMBIENT OXYGEN AND MOISTURE ON THE GROWTH OF NATIVE OXIDE ON SILICON SURFACES IN MINI-ENVIRONMENTS Saga, K., Kuniyasu, H., Hattori, T. Electrochemical Society	10 Conference Proceedings Surface and Interface Structures of Ultrathin Silicon Oxynitride Films Takahashi, K., Inoue, K., Kato, H., Tamura, N., Hikazutani, K., Sano, S., Hattori, T. Electrochemical Society
5 Conference Proceedings CHEMICAL ADDITIVE FORMULATIONS FOR SILICON SURFACE CLEANING IN SUPERCRITICAL CARBON DIOXIDE Korzenski, M., Xu, C., Baum, T., Saga, K., Kuniyasu, H., Hattori, T. Electrochemical Society	11 Conference Proceedings Optimization of ultra-trace analysis in silicon wafer manufacturing using Taguchi-methods Fabry, L., Pahlke, S., Kotz, L., Ruefer, H., Ehmann, T., Baechmann, K. Electrochemical Society
6 Conference Proceedings KEY ISSUES IN WET CHEMICAl CLEANING OF SILICON SURFACES Hattori, T. Electrochemical Society	12 Conference Proceedings Trace Organics in Arizona Surface and Wastewaters C. Chiu, P. K. Westerhoff American Chemical Society

1

2

3

4

5

6

7

8

9

10

11

12