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Investigation of Slow/Fast Interface States of AI203 / Si MOS System Using Deep Level Transient Spectroscopy

Author(s):
Jeon, I.S. ( (School of Materials Science and Engineering, Seoul National University) )
Eom, D. ( (School of Materials Science and Engineering, Seoul National University) )
Cho, M. ( (School of Materials Science and Engineering, Seoul National University) )
Park, H.B. ( (School of Materials Science and Engineering, Seoul National University) )
Park, J. ( (School of Materials Science and Engineering, Seoul National University) )
Hwang, C.S. ( (School of Materials Science and Engineering, Seoul National University) )
Kim, H.J. ( (School of Materials Science and Engineering, Seoul National University) )
2 more
Publication title:
Dielectrics in emerging technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-1
Pub. Year:
2003
Page(from):
350
Page(to):
357
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773461 [1566773466]
Language:
English
Call no.:
E23400/200301
Type:
Conference Proceedings

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