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Chemcterization of Low-k to Extreme Low-k SiCOH Dielectrics

Author(s):
Publication title:
Dielectrics in emerging technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-1
Pub. Year:
2003
Page(from):
315
Page(to):
322
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773461 [1566773466]
Language:
English
Call no.:
E23400/200301
Type:
Conference Proceedings

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