Device and Process Technology Requirements for Next-Generation, Ultra-High- Performance Poly-Si TFTs
- Author(s):
- Voutsas, A.T.
- Publication title:
- Thin Film Transistor Technologies VI : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-23
- Pub. Year:
- 2002
- Page(from):
- 109
- Page(to):
- 118
- Pages:
- 10
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773850 [1566773857]
- Language:
- English
- Call no.:
- E23400/200223
- Type:
- Conference Proceedings
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