Blank Cover Image

Location-Control of Large Grains by -μCzochralski (Grain Filter) Process and Its Application to Singlc Crystalline Si Thin Film Transistors

Author(s):
Publication title:
Thin Film Transistor Technologies VI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-23
Pub. Year:
2002
Page(from):
63
Page(to):
74
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773850 [1566773857]
Language:
English
Call no.:
E23400/200223
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Advanced excimer laser crystallization techniques of Si thin film for location control of large grain on glass

Ishihara,R., Wilt,P.Ch.van der, Dijk,B.D.van, Burtsev,A., Voogt,F.C., Bertens,G.J., Metselaar,J.W., Beenakker,C.I.M.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Influence of Channel Position on Characteristics of p-Channel c-Si TFT Inside a Location-Controlled Grain

Rana, V., Ishihara, R., Andel, I., Hiroshima, Y., Abe, D., Inoue, S., Shimoda, T., Metselaar, J.W., Beenakker, K.

Electrochemical Society
2 Conference Proceedings Property of single-crystalline Si TFTs fabricated with μ-Czochralski (grain filter) process (Invited Paper)

Ishihara, R., Wilt, P.C., Dijk, B.D., Metselaar, J.W., Beenakker, C.I.M.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Modelling of Thin-Film Transistors in a Polycrystalline Silicon Layer with Large Grains

Spiekerman, A.J.G., van Dijk, P.D., Ishihara, R.

Electrochemical Society
3 Conference Proceedings Preparation of Large, Location-Controlled Si Grains by Excimer Laser Crsytallization of α-Si Film Sputtered at 100℃

M. He, E. J. J. Neihof, Y. Van Andel, H. Schellevis, R. Ishihara, J. W. Metselaar, C. I. M. Beenakker

Materials Research Society
9 Conference Proceedings Single Grain Si TFTs Fabricated at 100℃ for Microelectronics on a Plastic Substrate

Ming He, R. Ishihara, T. Chen, J.W. Metselaar, C.I.M. Beenakker

Materials Research Society
4 Conference Proceedings Temperature Dependent Carrier Transport in Single-Crystalline Si TFTs Inside a Location-Controlled Grain

Rana, V., Ishihara, R., Hiroshima, Y., Abe, D., Inoue, S., Shimoda, T., Metselaar, J.W., Beenakker, C.I.M

Materials Research Society
10 Conference Proceedings Formation of Location-Controlled Germanium Grains by Excimer Laser

A. Baiano, R. Ishihara, J. Van der Cingel, K. Beenakker

Electrochemical Society
5 Conference Proceedings Temperature Dependent Carrier Transport in Single-Crystalline Si TFTs Inside a Location-Controlled Grain

Rana, V., Ishihara, R., Hiroshima, Y., Abe, D., Inoue, S., Shimoda, T., Metselaar, J.W., Beenakker, C.I.M.

Materials Research Society
11 Conference Proceedings Location Control of Laterally Columnar Si Grains by Dual-Beam Excimer-Laser Melting of Si Thin Film

Ishihara, Ryoichi

Materials Research Society
6 Conference Proceedings Location-Controlled Large-Grains in Near-Agglomeration Excimer-Laser Crystallized Silicon Films

Wilt, Paul Ch. van der, Ishihara, Ryoichi, Bertens, Jurgen

Materials Research Society
12 Conference Proceedings Defect States in Excimer-Laser Crystallized Single-Grain TFTs Studied With Isothermal Charge Deep-Level Transient Spectroscopy

V. Nadazdy, V. Rana, R. Ishihara, S. Lanyi, R. Durny, J. W. Metselaar, C. I. M. Beenakker

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12