Blank Cover Image

Polysilicon CMOS TFTs Inverters with a Gate Silicon Oxide Deposited using PECVD with Hexamethyldisiloxane (HMDSO)

Author(s):
Gautier, G.
Coulon, N.
Viana, C.E.
Crand, S.
Rogel, R.
Goullet, A.
Morimoto, N.I.
Bonnaud, O.
3 more
Publication title:
Thin Film Transistor Technologies VI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-23
Pub. Year:
2002
Page(from):
55
Page(to):
62
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773850 [1566773857]
Language:
English
Call no.:
E23400/200223
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Quality TEOS Silicon Oxide Deposited at Low Temperature for TFT Gate Dielectric Application

Morimoto, N.I., Viana, C.E., da Silva, A.N.R.

Electrochemical Society
7 Conference Proceedings Stability of Microcrystalline Silicon TFTs

K. Belarbi, K. Kandoussi, N. Coulon, C. Simon, R. Cherfi

Electrochemical Society
2 Conference Proceedings Electrical Characteristics of PECVD Silicon Oxide Deposited with Low TEOS Content at Low Temperatures

Rocha, O. F., Viana, C. E., Gonfalves, L. C. D., Morimoto, N. I.

Electrochemical Society
8 Conference Proceedings Mechanical Properties of Silicon Oxide Films Deposited by PECVD-TEOS for Application in MEMS Structures and Sensors

Goncalves, L.C.D., Silva, A.N.R., Alfano, C.F., Santos, J.C., Morimoto, N.I.

Electrochemical Society
3 Conference Proceedings High Mobility Top-Gate Micro-Crystalline Silicon TFTs Processed at Low Temperature (<200oC)

Saboundji, A., Coulon, N., Simon, C., Mohammed-Brahim, T., Bonnaud, O.

Electrochemical Society
9 Conference Proceedings High Performance Low Temperature Polysilicon TFT's with Ultra-thin Liquid-phase Deposited Gate Oxide and N2O Plasma Treatment

Yeh, C-F., Wang, S.-C., Jeng, J.-N., Lu, C.-Y.

Electrochemical Society
4 Conference Proceedings Uniform OLED-Pixels Using Microcrystalline Silicon TFTs for Active-Matrix Addressing

T. Mohammed-Brahim, A. H. Gaillard, R. Rogel, S. Crand, C. Prat

Electrochemical Society
10 Conference Proceedings Polysilicon TFTs Made by Using Different Crystallization Techniques

Mohammed-Brahim, T., Bonnaud, O., Helen, Y.

Electrochemical Society
5 Conference Proceedings Full Optimized Process of Polysilicon TFT's Using Very Large Excimer Laser

Helen, Y., Gautier, G., Mourgues, K., Mohammed-Brahim, T., Raoult, F., Bonnaud, O., Prat, C., Zahorski, D., Lemoine, D.

Electrochemical Society
11 Conference Proceedings High-performance polysilicon air-gap thin film transistor on low-temperature substrates

Mahfoz-Kotb, H., Salaun, A.-C., Mohammed-Brahim, T., Coulon, N., Bonnaud, O., Mevellec, J.-Y.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings High Density-PECVD Silicon Oxide Deposition by TEOS and Oxygen at Low Temperature (375℃)

Viana, C.E., Santos, J.L.R., Monmoto, N.I.

Electrochemical Society
12 Conference Proceedings Development of a Cluster Tool and Analysis of Deposition of Silicon Oxide by TEOS/O2 PECVD

Morimoto, N. I., Swart, J. W.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12