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Chemical and Structural Characterization of Oxide Precipitates in Heavily Boron Doped Silicon by Infrared Spectroscopy and Transmission Electron Microscopy

Author(s):
Gryse, O. De
Clauws, P.
Vanhellemont, J.
Lebedev, O.
Van Landuyt, J.
Simoen, E.
Claeys, C.
2 more
Publication title:
High purity silicon VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-20
Pub. Year:
2002
Page(from):
183
Page(to):
196
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773447 [156677344X]
Language:
English
Call no.:
E23400/200220
Type:
Conference Proceedings

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