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Grown-in Defects in Nitrogen Doped Czochralski Silicon*

Author(s):
Publication title:
High purity silicon VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-20
Pub. Year:
2002
Page(from):
105
Page(to):
118
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773447 [156677344X]
Language:
English
Call no.:
E23400/200220
Type:
Conference Proceedings

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