Dynamics of Point Defects and Formation of Microdefects in Czochralski Crystal Growth: Modeling, Simulation and Experiments

Dynamics of Point Defects and Formation of Microdefects in Czochralski Crystal Growth: Modeling, Simulation and Experiments

Author(s):

Publication title:

High purity silicon VII : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2002-20

Pub. Year:

2002

Page(from):

27

Page(to):

48

Pages:

22

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773447 [156677344X]

Language:

English

Call no.:

E23400/200220

Type:

Conference Proceedings

Details

TDL ID:	ZA00014053
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on High Purity Silicon ; Meeting of the Electrochemical Society
Conf. info. (Number):	7th ; 202nd
Conf. info. (Venue):	Salt Lake City, Utah, USA
Conf. info. (Date):	2002.10.20-2002.10.25

Similar Items:

1 Conference Proceedings Point defects in silicon crystal growth Voronkov, V.V., Falster, R. Electrochemical Society	7 Conference Proceedings Nitrogen in Silicon: Properties and Impact on Grown-in Microdefects（Invited Paper） Voronkov, V.V., Falster, R. Electrochemical Society
2 Conference Proceedings Grown-in Microdefects in Silicon as a Guide to the Properties of Point Defects * Voronkov, V.V., Falster, R. Electrochemical Society	8 Conference Proceedings Uphill Drift of Vacancies and Self-Interstitials in Silicon Crystal Growth V. Voronkov, R. Falster Electrochemical Society
3 Conference Proceedings Simplified Two-Dimensional Quantification of the Microdefect Distributions in Silicon Crystals Grown by Czochralski Process Kulkarni, M.S., Voronkov, V.V. Electrochemical Society	9 Conference Proceedings MODELING MICRODEFECT FORMATION IN CZOCHRALSKI SILICON Sinno, T., Brown, R.A. Electrochemical Society
4 Conference Proceedings Parameters of Intrinsic Point Defects in Silicon Based on Crystal Growth, Wafer Processing, Self- and Metal-Dìffusion V. V. Voronkov, R. Falster Electrochemical Society	10 Conference Proceedings GROWN-IN MICRODEFECT DISTRIBUTION IN DOPED SILICON CRYSTALS Borioneui, G., Gambaro, D., Porrini, M., Voronkov, V.V. Electrochemical Society
5 Conference Proceedings Behaviour and effects of intrinsic point defects in the growth of large silicon crystals Voronkov, V.V., Falster, R., Holzer, J.C. Electrochemical Society	11 Conference Proceedings GROWN-IN MICRODEFECT DISTRIBUTION IN DOPED SILICON CRYSTALS Borioneui, G., Gambaro, D., Porrini, M., Voronkov, V.V. Electrochemical Society
6 Conference Proceedings INVITED: INTRINSIC POINT DEFECTS AND REACTIONS IN THE GROWTH OF LARGE SILICON CRYSTALS Falster, R., Voronkov, V.V., Holzer, J.C., Markgrafh, S., McQuaid, S.A., Mule'Stagno, L. Electrochemical Society	12 Conference Proceedings POINT DEFECT DYNAMICS IN SILICON AND THE CON- NECTION BETWEEN MICRODEFECT FORMATION AND OPERATING CONDITIONS IN THE BULK GROWTH OF SILICON Sinno, T., Brown, R.A. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12