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Radical Control in a Hole to Break an Etch-Stop Barrier in Highly Selective HAC Etching

Author(s):
Publication title:
Plasma processing XIV : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-17
Pub. Year:
2002
Page(from):
239
Page(to):
250
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773416 [1566773415]
Language:
English
Call no.:
E23400/200217
Type:
Conference Proceedings

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