High Density Plasma Deposited Silicon Nitride Films for Coating InGaAlAs High-Power Lasers
- Author(s):
- Publication title:
- Plasma processing XIV : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-17
- Pub. Year:
- 2002
- Page(from):
- 35
- Page(to):
- 42
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773416 [1566773415]
- Language:
- English
- Call no.:
- E23400/200217
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Passivation of III/V-based Compound Semiconductor Devices Using High-Density Plasma Deposited Silicon Nitride Films
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Carrier density dependence of the lifetime of InGaAs/AlGaAs high-power lasers
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Wet Etching Studies on Electron Cyclotron Resonance (ECR) Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Films
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
High-power high-brightness tapered diode lasers and amplifiers (Invited Paper)
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Thermally Induced Stress Changes in High Density Plasma Deposited Silicon Nitride Films
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Composition and Mechanical Properties of Sill-con Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma-Enhanced Chemi-cal Vapor Deposition …
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
High-power high-brightness ridge-waveguide tapered diode lasers at 14xx nm
SPIE - The International Society of Optical Engineering |