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In Situ Monitoring of Thin Film Reactions During Rapid Thermal Annealing: Nickel Silicide Formation

Author(s):
Lavoje, C.
Purtell, R.
Cola, C.
Detavernier, C.
Desjardins, P.
Jordan-Sweet, J.
Cabral, C., Jr.
d'Heurle, F.M.
Harper., J.M.E.
4 more
Publication title:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-11
Pub. Year:
2002
Page(from):
455
Page(to):
468
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773348 [1566773342]
Language:
English
Call no.:
E23400/200211
Type:
Conference Proceedings

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