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Stable TiOx Sub-Micrometer Channels

Author(s):
Publication title:
Microfabricated systems and MEMS VI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-6
Pub. Year:
2002
Page(from):
130
Page(to):
135
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773720 [1566773725]
Language:
English
Call no.:
E23400/2002-6
Type:
Conference Proceedings

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