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Use of Continuous Hinges and Microrivets to Facilitate the Assembly of Three-Dimensional Polysilicon Microelectromechanical Systems (MEMS) Structures

Author(s):
Kolesar, E.S.
Ruff, M.D.
Odom, W.E.
Ko, S.Y.
Howard, I.T.
Allen, P.B.
Wilks, R.J.
Wilken, J.M.
Bosch, J.E.
Jayachandran, A.J.
Boydston, N.C.
6 more
Publication title:
Microfabricated systems and MEMS VI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-6
Pub. Year:
2002
Page(from):
84
Page(to):
89
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773720 [1566773725]
Language:
English
Call no.:
E23400/2002-6
Type:
Conference Proceedings

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