MOEMS Electrostatic Scanning Micromirrors Design and Fabrication

MOEMS Electrostatic Scanning Micromirrors Design and Fabrication

Author(s):

Patterson, P.R. ( (University of California at Los Angeles) )
Hah, D. ( (University of California at Los Angeles) )
Su, Gi. ( (University of Tokyo) )
Toshiyoshi, H. ( (University of Tokyo) )
Wu, M. C. ( (University of Califor-nia at Los Angeles) )

Publication title:

Integrated optoelectronics : proceedings of the first international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2002-4

Pub. Year:

2002

Page(from):

369

Page(to):

380

Pages:

12

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773706 [1566773709]

Language:

English

Call no.:

E23400/2002-4

Type:

Conference Proceedings

Details

TDL ID:	ZA00014038
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Integrated Electronics
Conf. info. (Number):	1st
Conf. info. (Venue):	Philadelphia, Pennsylvania, USA
Conf. info. (Date):	2002.05.12-2002.05.17

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