INTRODUCTORY REMARKS -- ALTERNATIVE MATERIALS AND IC PROCESS TECHNOLOGIES

Author(s):

Publication title:

Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2002-2

Pub. Year:

2002

Page(from):

325

Page(to):

327

Pages:

3

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773744 [1566773741]

Language:

English

Call no.:

E23400/2002-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00014036
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Silicon Materials Science and Technology
Conf. info. (Number):	9th
Conf. info. (Venue):	Philadelphia, PA, USA
Conf. info. (Date):	2002.05.13-2002.05.17

1 Conference Proceedings INTRODUCTORY REMARKS -- ALTERNATIVE MATERIALS AND IC PROCESS TECHNOLOGIES Iwai, H., Maszara, W. Electrochemical Society	7 Conference Proceedings INTRODUCTORY REMARKS Yoshihara, H. Advisory Group for Aerospace Research and Development
2 Conference Proceedings INTRODUCTORY REMARKS - ALTERNATIVE MATERIAL SYSTEMS Celler, G.K., Steckl, A.J. Electrochemical Society	8 Conference Proceedings Introductory Remarks Hosack, H. Electrochemical Society
3 Conference Proceedings INTRODUCTORY REMARKS -- PROCESS MODELING Mertens, P., Richter, H. Electrochemical Society	9 Conference Proceedings Introductory Remarks Galambos R., Bullock H. T. Plenum Press
4 Conference Proceedings INTRODUCTORY REMARKS -- PROCESS MODELING Mertens, P., Richter, H. Electrochemical Society	10 Conference Proceedings Extending Planar Single-Gate CMOS & Accelerating the Realization of Double-Gate/Multi-Gate CMOS Devices* Borland, J.O., Iwai, H., Maszara, W., Wang, H. Electrochemical Society
5 Conference Proceedings Introductory Remarks: Materials and Process Integration S. Ikeda, M. Rodder Electrochemical Society	11 Conference Proceedings INTRODUCTORY REMARKS - SILICON MATERIALS: GENERIC ISSUES von Ammon, W., Shigematsu, T. Electrochemical Society
6 Conference Proceedings Introductory Remarks Otten W. E. Plenum Press	12 Conference Proceedings INTRODUCTORY REMARKS - SILICON MATERIALS: 300mm von Ammon, W., Shigematsu, T. Electrochemical Society

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