OXIDATION-INDUCED STACKING FAULTS IN NITROGEN DOPED CZOCHRALSKI SILICON
- Author(s):
- Publication title:
- Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-2
- Pub. Year:
- 2002
- Page(from):
- 273
- Page(to):
- 279
- Pages:
- 7
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773744 [1566773741]
- Language:
- English
- Call no.:
- E23400/2002-2
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
9
Conference Proceedings
Oxygen Precipitation of Nitrogen-Doped Czochralski Silicon Subjected to Multi-Step Thermal Process
Electrochemical Society |
Electrochemical Society, SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
EBIC Study of Fe Precipitation on Bulk Stacking Fault in Czochralski-Grown Silicon
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |