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EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS

Author(s):
Bae, K-M.
Kim, J-R.
Hong, Y-K.
So, S-I.
Lee, S-C.
Kim, S-S.
Ha, S-W.
Koh, C-G.
Pyi, S-H.
Lee, D-M.
5 more
Publication title:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-2
Pub. Year:
2002
Page(from):
786
Page(to):
792
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
Language:
English
Call no.:
E23400/2002-2
Type:
Conference Proceedings

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