EFFECTIVE INTRINSIC GETITERING FOR 200 mm AND 300 mm P/P- WAFERS IN LOW THERMAL BUDGET 0.13 μm ADVANCED CMOS LOGIC PROCESS
- Author(s):
- Publication title:
- Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-2
- Pub. Year:
- 2002
- Page(from):
- 647
- Page(to):
- 657
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773744 [1566773741]
- Language:
- English
- Call no.:
- E23400/2002-2
- Type:
- Conference Proceedings
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