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STUDY OF DIFFUSIVITY AND ELECTRICAL PROPERTIES OF Zr AND Hf IN SILICON

Author(s):
Vyvenko, O.F.
Sachdeva, R.
Istratov, A.A.
Armitage, R.
Weber, E.R.
Deenapanray, P.N.K.
Jagadish, C.
Gao, Y.
Huff, H.R.
4 more
Publication title:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-2
Pub. Year:
2002
Page(from):
440
Page(to):
452
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
Language:
English
Call no.:
E23400/2002-2
Type:
Conference Proceedings

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