Blank Cover Image

IMPACT OF NITROGEN DOPING IN SILICON ONTO GATE OXIDE INTEGRITY

Author(s):
Huber, A.
Kapser, M.
Grabmeier, J.
Lambert, U.
von Ammon, W.
Pech, R.
1 more
Publication title:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-2
Pub. Year:
2002
Page(from):
280
Page(to):
286
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
Language:
English
Call no.:
E23400/2002-2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings IMPACT OF NITROGEN DOPING IN SILICON ONTO GATE OXIDE INTEGRITY

Huber, A., Kapser, M., Grabmeier, J., Lambert, U., Ammon, W.v., Pech, R.

Electrochemical Society
7 Conference Proceedings MODELLING OF CRYSTAL ORIGINATED PARTICLES AND THEIR IMPACT ON GATE OXIDE INTEGRITY

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society
2 Conference Proceedings Formation and Control of Defects in Nitrogen Doped Silicon Crystals （Invited Paper）

Huber, A., Lambert, U., Hackl, W., Ammon, W.v.

Electrochemical Society
8 Conference Proceedings MODELLING OF CRYSTAL ORIGINATED PARTICLES AND THEIR IMPACT ON GATE OXIDE INTEGRITY

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society
3 Conference Proceedings The Impact of the Dwell Time Above 900℃ During Crystal Growth on the Gate Oxide Integrity of Silicon Wafers

Dornberger, E., von Ammon, W., Graef, D., Lambert, U., Miller, A., Oelkrug, H., Ehlert, A.

Electrochemical Society
9 Conference Proceedings On the Influence of Nitrogen and Carbon on the Formation of Dislocations in Heavily Doped Silicon Wafers

Winkler, R., Krautbauer, R., Pech, R.

Electrochemical Society
4 Conference Proceedings GATE OXIDE RELATED BULK PROPERTIES OF OXYGEN DOPED FLOATING ZONE AND CZOCHRALSKI SILICON

Ammon, W.v., Ehlert, A., Lambert, U., Graef, D., Brohl, M., Wagner, P.

Electrochemical Society
10 Conference Proceedings Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity

Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S.

MRS - Materials Research Society
5 Conference Proceedings Reliability of Gate Oxides on Silicon Substrates with 5-10 nm Oxide Thickness

Huber, A., Grabmeler, J., Lambert, U., Wahlich, R.

Electrochemical Society
11 Conference Proceedings Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity

Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S.

MRS - Materials Research Society
6 Conference Proceedings The Impact of Crystal Quality by Delineation of COP and the Impact on the Silicon Wafer Surface

Graef, D., Suhren, M., Lambert, U., Schmolke, R., Ehiert, A., Ammon, W.v., Wagner, P.

Electrochemical Society
12 Conference Proceedings Grown-in oxide precipitate nuclei in Czochralski silicon substrates and their role in device processing

Kissinger, G., Grabolla, T., Morgenstern, G., Richter, H., Graef, D., Vanhellemont, J., Lambert, U., von Ammon, W.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12