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Organic contamination on wafers surfaces: measurement techniques and deposition kinetics

Author(s):
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-29
Pub. Year:
2001
Page(from):
294
Page(to):
307
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773638 [1566773636]
Language:
English
Call no.:
E23400/200129
Type:
Conference Proceedings

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