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Implantation induced defects in silicon detected by Cu decoration technique

Author(s):
Koegler, R.
Peeva, A.
Eichhorn, F.
Kaschny, J.
Voelskow, M.
Skorupa, W
Hutter, H.
2 more
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-29
Pub. Year:
2001
Page(from):
133
Page(to):
142
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773638 [1566773636]
Language:
English
Call no.:
E23400/200129
Type:
Conference Proceedings

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