Wafer Bonding using Oxygen Plasma Treatment in RIE and ICP RIE
- Author(s):
- Publication title:
- Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-27
- Pub. Year:
- 2001
- Page(from):
- 31
- Page(to):
- 40
- Pages:
- 10
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773607 [1566773601]
- Language:
- English
- Call no.:
- E23400/200127
- Type:
- Conference Proceedings
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