SPECTROSCOPIC AND ELECTROCHEMICAL STUDIES OF THE GROWTH OF CHEMICAL OXIDE IN SC1 AND SC2

SPECTROSCOPIC AND ELECTROCHEMICAL STUDIES OF THE GROWTH OF CHEMICAL OXIDE IN SC1 AND SC2

Author(s):

Petitdidier, S.

Publication title:

Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2001-26

Pub. Year:

2001

Page(from):

205

Page(to):

210

Pages:

6

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773591 [1566773598]

Language:

English

Call no.:

E23400/200126

Type:

Conference Proceedings

Details

TDL ID:	ZA00014030
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Meeting of the Electrochemical Society
Conf. info. (Number):	7th ; 2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.09.00

Similar Items:

1 Conference Proceedings ELECTROCHEMICAL STUDY OF ULTRA-THIN SILICON OXIDES Bertagna, V., Erre, R., Petitdidier, S., Levy, D., Chemla, M. Electrochemical Society	7 Conference Proceedings ELECTROCHEMICAL STUDY OF THE ETCHING RATE OF SILICON SUBSTRATES BY DILUTE AMMONIA SOLUTIONS Bertagna, Valerie, Erre, Rene, Rouelle, Francois, Plougonven, Christian, Chemla, Marius Electrochemical Society
2 Conference Proceedings Electrical Characterization of Thin Oxide Layers by Impedance Spectroscopy Using SiliconlOxidefElectrolyte (SOE) Structures Chemla, M., Bertagna, V., Erre, R., Rouclle, F., Petitdidier, S., Levy, D. Electrochemical Society	8 Conference Proceedings CHEMICAL OXIDE CHARACTERIZATION Paillet, C., Joly, J.P., Tardif, F., Barla, K., Patruno, P., Levy, D. Electrochemical Society
3 Conference Proceedings Impedance Diagrams of Semiconductor/Oxide/Electrolyte (SOE) Structures to Derive Equivalent R-C Components of the Semiconductor Space Charge Chemla, M., Bertagna, V., Erre, R., Ronelle, F., Petitdidier, S., Levy, D. Electrochemical Society	9 Conference Proceedings ELECTROCHEMICAL AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF UO2 FUEL OXIDATION BY SPECIFIC RADICALS FORMED DURING RADIOLYSIS OF GROUNDWATER Sunder, S., Shoesmith, D.W., Christensen, H., Bailey, M.G., Miller, N.H. Materials Research Society
4 Conference Proceedings Silicon Surface Chemical Treatments In Oxide/ Nitride Dielectric Stack Properties Jacques, D., Petitdidier, S., Regolini, J.L., Barla, K. Materials Research Society	10 Conference Proceedings ELECTROCHEMICAL AND RADIOCHEMACAL STUDY OF COPPER CONTAMINATION MECHANISM FROM HF SOLUTIONS ONTO SILICON SUBSTRATES Bertagna, V., Rouelle, F., Chemla, M. Electrochemical Society
5 Conference Proceedings A Neutron Reflectivity Study of Silicon Oxide Thin Films Bertagna, V., Menelle, A., Petitdidier, S., Levy, D., Saboungi, M.-L Electrochemical Society	11 Conference Proceedings Analytical Characterization of Process Parameter Influence on the Initial Growth and Crystallinity of Atomic Layer Deposition HfO2 Thin Films Blin, D., Rochat, N., Rolland, G., Holliger, P., Martin, F., Damlencourt, J.-F., Lardin, T., Besson, P., Haukka, S., … SPIE-The International Society for Optical Engineering
6 Conference Proceedings High Reliable In Situ Steam Generation Process for 1.5-2.5 nm Gate Oxides Bidaud, M., Guyader, F., Glowacki, F., Monsieur, F., Ray, D., Bruyere, S., Vincent, E., Barb, K. Electrochemical Society	12 Conference Proceedings Analytical Characterization of Process Parameter Influence on the Initial Growth and Crystallinity of Atomic Layer Deposition HfO2 Thin Films Bun, D., Rochat, N., Rolland, G., Holliger, P., Martin, F., Damlencourt, J.-F., Lardin, T., Besson, P., Haukka, S., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12