Blank Cover Image

DIFFERENT ADSORPTION BEHVIORS OF PLATINUM GROUP METALS ONSILICON SURFACES

Author(s):
Publication title:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-26
Pub. Year:
2001
Page(from):
102
Page(to):
109
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
Language:
English
Call no.:
E23400/200126
Type:
Conference Proceedings

Similar Items:

Yokoi, I., Choi, G.-M., Ohmi, T.

Electrochemical Society

Nii, K., Akahori, H., Yamamoto, M., Teramoto, A., Ohmi, T.

Electrochemical Society

Sekine, K., Choi, G.-M., Morita, H., Ohmi, T.

Electrochemical Society

A. Ishihara, M. Tamura, Y. Maekawa, Y. Ohgi, K. Matsuzawa

Electrochemical Society

Nagase, M., Kitano, M., Wakayama, Y., Shirai, Y., Ohmi, T.

Electrochemical Society

Ohmi, T.

Electrochemical Society

Takahashi, A., Kawaguchi, M., Hayashi, K., Kato, T.

American Chemical Society

A. Kawashima, K. Takamura, T. Shimada, H. Habazaki, K. Asami, K. Hashimoto

Electrochemical Society

Hosoda, H., Tsuji, M., Takahashi, Y., Inamura, T., Wakashima, K., Yamabe-Mitarai, Y., Miyazaki, S., Inoue, K.

Trans Tech Publications

Izumi, H., Nakagawa, Y., Miyoshi, S., Ohmi, T.

Electrochemical Society

6 Conference Proceedings Micro-Arc Nitriding of Titanium Surface

Matsuura, K., Arita, H., Ohmi, T., Kudoh, M., Miyamoto, Y.

Trans Tech Publications

Kim, J.-S., Morita, H., Joo, J.-D., Ohmi, T.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12