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EVALUATION OF NEW MEGASONIC SYSTEM FOR SINGLE WAFER CLEANING

Author(s):
Takeuchi, K.
Tomozawa, A.
Onishi, A.
Tanzawa, A.
Azuma, T.
Umemura, S.-I.
Wu, Y.
Bran, M.
Fraser, B.
4 more
Publication title:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-26
Pub. Year:
2001
Page(from):
15
Page(to):
22
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
Language:
English
Call no.:
E23400/200126
Type:
Conference Proceedings

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