Microwave Plasma Deposition of CVD Diamond Films for MEMS Applications
- Author(s):
- Publication title:
- Diamond materials VII : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-25
- Pub. Year:
- 2001
- Page(from):
- 252
- Page(to):
- 263
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773584 [156677358X]
- Language:
- English
- Call no.:
- E23400/200125
- Type:
- Conference Proceedings
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