Blank Cover Image

Inductively Coupled Plasma Etching of Pb(ZrxTil-x)O3 Thin Films In Cl2C2F6 and HBr Plasmas

Author(s):
Publication title:
Thin film materials, processes, and reliability : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-24
Pub. Year:
2001
Page(from):
63
Page(to):
68
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773577 [1566773571]
Language:
English
Call no.:
E23400/200124
Type:
Conference Proceedings

Similar Items:

Efremov, A., Svettsov, V., Kim, C.-I.

SPIE - The International Society of Optical Engineering

Kang, Myoung Gu, Kim, Chang-Il

Electrochemical Society

Kim, H. S., Lee, Y. J., Lee, Y. H., Lee, J. W., Yoo, M. C., Kim, T. I., Yeom, G. Y.

MRS - Materials Research Society

Sung, K.H., Park, B.W., Kim, J.I., Kim, J.J., Bae, H.K., Park, Y.H., Hur, C.W.

Materials Research Society

Kim, C-I., Kim, N-H., Chang, E-G., Kwon, K-H., Yeom, G-Y., Seo, Y-J.

MRS - Materials Research Society

Kim,J.-H, Ryu,J.-O., Kim,J.-S., Kim,J.-W., Seol,Y.-S

SPIE-The International Society for Optical Engineering

Kim, Dong-Pyo, Kim, Chang-Il

Electrochemical Society

Lee, W., Yang, H., Lee, J.

Electrochemical Society

Kim, J-H., Ryu, J-O., Kim, J-S., Lee, B-C., Kim, J-W., Seol, Y-S.

Electrochemical Society

Byul Shin, Ik Hyun Park, Chee Won Chung

Elsevier

Wu, X., Zhou, C., Xi, P., Dai, E., Ru, H., Liu, L.

SPIE-The International Society for Optical Engineering

K. Worhoff, J. Bradley, F. Ay, M. Pollnau

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12